Hitachi High-Technologies SU8040 FE-SEM

Hitachi High-Technologies SU8040 field emission scanning electron microscope (FE-SEM) features a newly developed Regulus (REGULated Ultra Stable) Stage. It is claimed to be smooth operating even at high magnification observation.

FE-SEM has become an indispensable tool for semiconductor industry and cutting-edge nanotechnology material analysis. These samples often have nm order level structure, therefore it is necessary to use ultra-high magnification such as hundreds of thousand times magnification.

To meet user needs, Hitachi has developed the SU8040 that features a Regulus Stage that has the capability that can be operated smoothly even at ultra-high resolution. The Regulus stage has adopted a reliable conventional motor drive, but the capability has been greatly improved thanks to the newly developed motor drivetrain. Now the Regulus stage can achieve seamless stage operation and high-throughput observation without any stress.

Taking advantage of the good stage performance, cell count assist software is now available as an option.

The cell count assist software recognises the repeat patterns of DRAIWSRAM samples and more, which allows automated identification of patterns for measurement and defect analysis, eliminating tedious manual searching.

Moreover, there is no compromise on the basic performance as an FE-SEM. The SU8040 has all the performance abilities of the FE-SEM model SU8000. And by optimising innovative electron optics design, the resolution at ultra-low landing voltages has been improved to 1.3 nm at landing voltage 1.0 kV. Along with increased resolution, practical imaging can now be achieved with the elimination of sample charging and optimum contrast by using Hitachi original SE/BSE signal mixing function.