JEOL JSM-IT510 series scanning electron microscope

Scanning electron microscope (SEM) applications are expanding to include not only basic research, but also quality control at manufacturing sites. Demands for fast and easy data acquisition of both SEM images and analysis results, such as energy dispersive X-ray spectroscopy (EDS) spectra, are therefore increasing. In order to meet these needs, JEOL has developed the JSM-IT510 series SEM.

The Simple SEM function allows the user to simply select the acquisition conditions and field of view for the SEM image, and then the SEM image is automatically acquired; routine work should thus be made more efficient. The Low-vacuum Hybrid Secondary Electron Detector (LHSED) meanwhile collects both electron and photon signals providing an image with high S/N and enhanced topographic information even under a low vacuum.

The Live Map function enables live display of the elemental map of the observation field of view. Through the Live 3D function, 3D images can be constructed on the spot while SEM observation is being performed to obtain unevenness and depth information. Through the Live Analysis function, the embedded EDS system shows a real-time EDS spectrum during image observation for efficient elemental analysis.

The Stage Navigation System LS can acquire an optical image of an area up to four times larger than that of conventional models (200 x 200 mm). This function allows the user to acquire an optical image of the observation sample and move to the desired observation field by simply clicking on the optical image.

With the Zeromag function, the user can locate areas for imaging or specify analysis positions over multiple fields using an optical image or holder graphic. Display of the characteristic X-ray generation depth meanwhile supports a prompt understanding of the analysis depth (reference) for the specimen.

Finally, SMILE VIEW Lab enables integrated management of image and analysis data. It facilitates report generation for all data from collected SEM images to elemental analysis results in a short time.