Olympus LEXT OLS5000 3D laser microscope

Olympus developed the LEXT OLS5000 laser measuring microscope to perform three-dimensional measurement of the surface shape of a wide variety of samples using a technique that is non-contact and non-destructive. Succeeding the OLS4100 microscope, the OLS5000 offers improved measurement performance, delivering high-resolution imaging at speeds four times faster. Samples that were previously difficult to measure can now be imaged due to the expanded range of LEXT dedicated lenses and the OLS5000 range of frames.

The microscope scans laser light over the surface of a sample to provide enlarged images of micro-scale features and to perform measurements of surface area roughness, steps and other features. It measures surface area roughness precisely and with ease for enhanced productivity, making it suitable for a broad range of applications.

The device features 4K scanning technology and enhanced optics designed to enable the detection of near-perpendicular features and small steps at close to the nanometre scale. It also comes with intuitive software designed for usability with features including the ability to automate settings that previously had to be specified by the operator. The software functionality ensures that measurement variability between different users is decreased while maintaining a high level of repeatability.

Large samples or samples with an uneven surface can be measured without preparation, using an expansion frame that can accommodate samples up to 210 mm tall and a long working objective lens designed specifically for the OLS5000 microscope. This provides support for sophisticated user requirements from performing observations through data acquisition, analysis and reporting.

The microscope can be used in R&D and quality inspection in a variety of applications, including semiconductors, electronic components, automotive, medical devices, material development, nanofabrication, advanced manufacturing and various additional engineering applications.