The JSM-7600F scanning electron microscope (SEM) combines high-resolution imaging and enhanced analytical capabilities. The system provides a resolution of 1.5 nm at 1 kV in GB mode and an accelerating voltage from 0.1 to 30 kV.
The system features magnification from 25 to 1,000,000x; high-resolution imaging comparable to cold field emission gun SEM; an in-lens thermal FE gun; and an aperture angle control lens, for optimum beam projection regardless of the level of probe current.
The system has analytical capabilities at a maximum probe current of 200 nA (15 kV) to support various types of sample analysis. It also features an r-filter to control energy selection and image mixture rate for secondary electron and backscattered electron images.
A Gentle Beam mode is available to minimise beam damage for ultra surface imaging.
Phone: 02 9451 3855
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