Quadrupole Mass Spectrometers

The HAL-RC series of Residual Gas Analysers brings together a range of quadrupole, ion source and detector configurations. The compact HALO 100-RC has 1 x 10-11 mbar minimum detectable partial pressure and the dual Faraday/Single Channel Electron Multiplier detection system of the HAL 201-RC has 5 x 10-14 mbar minimum detectable partial pressure. Each is calibrated against a standard reference calibration gas and secondary standard ionisation gauge.

All application requirements, whether they be routine leak checking and vacuum fingerprinting in semiconductor PVD, or chamber contamination monitoring and virtual leak identification in MBE, will each be met by a dedicated instrument in the HAL-RC Series of Residual Gas Analysers.

All Hiden HAL-RC systems support simultaneous multihead operation through Windows MASsoft PC. The integral ethernet LAN facility provides for up to 30 systems to be accommodated on a single LAN with bridges being used to connect additional systems. Easy access to each HAL-RC is provided for via standard ethernet nodes which can be located at any point on the LAN.

Applications include: multi-deposition chamber monitoring in semiconductor fabrication; multi-head systems for synchrotron beam line monitoring; and control and display of multi-systems of any Hiden type from one PC.

All Hiden HAL-RC systems are configured for automatic data storage during instrument operation &151; ensuring that no important event is overlooked, no data lost. With ASCII format export capability data can be quickly read into all Windows supported spreadsheet packages.